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Facility: LEAP
Name Model Description External Rate Internal Rate
ABMUSA Mask Aligner ABMUSA Mask Aligner 6" 500W DUAL CCD

Dual camera semiautomated 6" mask aligner system with vacuum contact between mask and substrate, includes backside IR illumination, set up for i-line (365 nm), and also has deep UV bulb (200 nm)

$115 / hr. Self Use
$215 / hr. Training
$215 / hr. Assisted Use
$40 / hr. Self Use
$90 / hr. Training
$90 / hr. Assisted Use
LEAP Cleanroom Cleanroom Class 10,000

Approximately 600 square feet of class 10,000 cleanroom space for micro and nano-fabrication. The Nanoscribe Photonic Professional GT+, ZYGO nexview NX2 optical profilometer, KLA Tencor AlphaStep D600, CEE Apogee spin coater and ABMUSA Mask Aligner reside in this room. Benchtop space and a 4' x 6' floating optical table are available for clean assembly and optical…

$30 / hr. Self Use
$10 / hr. Self Use
FormFactor MPS-150 with wafer stage FormFactor Probe Station MPS-150 w/ wafer stage

Probe station with 150 mm platen, manual positioners and stereo microscope system

contact for more info contact for more info
Harrick Plasma Harrick Plasma Cleaner PDC-001 HP

6" diameter, 6.5" pyrex chamber, suitable for etching organic films 10-100 nm, three RF power settings up to 45 W max, connected to high purity O2 cylinder. 

$100 / hr. Self Use
$200 / hr. Training
$200 / hr. Assisted Use
$20 / hr. Self Use
$70 / hr. Training
$70 / hr. Assisted Use
Keyence VHX-7000 Keyence Digital Microscope VHX-7000

Digital 3D microscope with 4k imaging from 20x-2500x. Includes motorized and encoded XY stage with encoded Z height, 3D software for surface roughness , profiling and 3D image stitching. 

$55 / hr. Self Use
$155 / hr. Training
$155 / hr. Assisted Use
$20 / hr. Self Use
$70 / hr. Training
$70 / hr. Assisted Use
Keysight PNA Network Analyzer Keysight 67 GHz 4-port PNA Rack Keysight N5227B, Keysight N4373E

This rack contains a Keysight 4-port PNA Network Analyzer and Keysight Lightwave Component Analyzer testing photonic integrated circuits on the MapleLeaf Photonics and FormFactor Probe Stations as well as high speed electronics and microwave photonics up to 67 GHz.

contact for more info contact for more info
Keysight Semiconductor Device Analyzer and AWG Keysight AWG and Semiconductor Device Analyzer Keysight DSAV204A, Keysight M8195A, Keysight B1500A

This rack contains a Keysight Semiconductor Device Analyzer, a 65 GSa/sec Arbitrary Waveform Generator, and a 20 GHz Digital Signal Analyzer, and a polarization synthesizer, and optical wavelength and power meters for testing photonic integrated circuits on the MapleLeaf Photonics and FormFactor Probe Stations. 

contact for more info contact for more info
KLA Stylus Profilometer KLA Stylus Profilometer Alpha Step D600

200 mm platen with motorized XY stage for 2D and 3D profiling for film heights from ~100 nanometers to 1200 micrometers. Includes step height standards for reference.

$65 / hr. Self Use
$165 / hr. Training
$165 / hr. Assisted Use
$15 / hr. Self Use
$65 / hr. Training
$65 / hr. Assisted Use
MapleLeaf Photonics Probe Station MapleLeaf Photonics Probe Station SD100

MapleLeaf Photonics probe station with single die mount stage, edge and grating coupling capabilties, including contact sensors, automated die eject, Long-travel piezo fiber positioner with motorized 6 DOF, top view and side view cameras, electrical probe positioners, manual fiber align stage.

 

$60 / hr. Self Use
$160 / hr. Training
$160 / hr. Assisted Use
contact for more info
Meyer Burger ink jet printer Meyer Burger / SUSS Ink Jet Printer LP50

Digital 3D printer with 227 x 327 mm substrate table, dual printheads, drop analysis camera, ink recirculation, UV curing bridge, substate heater, Gerber file rasterzation, supports FujiFilm Dimatix, Konica Minolta, OCE and Xaar printheads

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Nanoscribe GT+ Nanoscribe 3D Printer Photonic Professional GT+

2 photon polymerization 3D printer with ~200 nm lateral and vertical resolution, set up to support small feature (SF), medium feature (MF) and large feature (LF) through 63x, 25x, 20x, and 10x objecdtive lenses for printing on ITO, soda lime and silicon substrates. Includes Nanoscribe resins IP-DIP, IP-L, IP-S, IP-Q, IP-Visio and IP-PDMS.

$100 / hr. Self Use
$200 / hr. Training
$200 / hr. Assisted Use
$35 / hr. Self Use
$85 / hr. Training
$85 / hr. Assisted Use
Nikon Stereo Microscope Nikon Stereo microscope SMZ800N

Manual stereo microscope with trinocular setup for magnification range from 10-70x, includes Nikon Elements-D software for image capture, measurement and annotations.

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Optical fiber fusion splicer HJ Optronics PFS 500

Portable fiber cleaving and fusion spicing for single mode, multimode and PM fibers

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NX20 Park Systems AFM NX20

200 mm platen with motorized XY stage, AFM supports contact, non-contact and tapping modes as well as other advanced electrical, mechanical and thermal scanning modes. Includes SmartScan scanning and XEI software for image processing. 

$100 / hr. Self Use
$200 / hr. Training
$200 / hr. Assisted Use
$30 / hr. Self Use
$80 / hr. Training
$80 / hr. Assisted Use
Keysight fiber laser and detector rack Photonic Integrated Circuit Testing Rack Keysight 8164B, Keysight 81606A, Keysight 81606A, Keysight N7744A, Keysight 86120D, Keysight N7786B

This rack contains tunable fiber lasers (centered on 1310 nm, and 1550 nm), a polarization synthesizer, and optical wavelength and power meters for testing photonic integrated circuits on the MapleLeaf Photonics and FormFactor Probe Stations. 

$60 / hr. Self Use
$160 / hr. Training
$160 / hr. Assisted Use
contact for more info
Spin Coater Spin Coater CEE

Spin coater to accommodate substrates from mm to 200 mm or 7"x7" substrates USB and ethernet ports for uploading or downloading recipe parameters, max spin speed 12,000 rpm.

included in cleanroom rate included in cleanroom rate
KUB UV Lightbox UV Exposure System UV Kub 2

UV curing system with 385 nn LED array, can be used as course photolithography system with mask in direct contact.

included in cleanroom rate included in cleanroom rate
Xenics Bobcat VSWIR camera Visible & Short Wave Infrared camera (vSWIR) Xenics Bobcat 640

visible and shortwave infrared (vSWIR) camera 640x512 resolution and 100 Hz frame rate with GigE interface. Includes 50 mm focal length C-mount lens and is also compatible with Navitar 12x telecentric zoom lens. Can be incorporated into the MapleLeaf Photonics Probe stations for fiber alignment and imaging.

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Nexview nexview nx2 ZYGO 3D Optical Profilometer Nexview nx2

Conherence Scanning Interferometer (CSI) microscope for non-contact 2D and 3D surface profiling, includes 2.75x, 10x, and 50x objective lenses. Motorized 200 mm x 200 mm stage with 100 mm of Z travel allows for automated measurements and image stitching. Uses MX v8 software. 

$85 / hr. Self Use
$185 / hr. Training
$185 / hr. Assisted use
$30 / hr. Self Use
$80 / hr. Training
$80 / hr. Assisted use