Lab Equipment Listing

Dual camera semiautomated 6" mask aligner system with vacuum contact between mask and substrate, includes backside IR illumination, set up for i-line (365 nm), and also has deep UV bulb (200 nm)

Approximately 600 square feet of class 10,000 cleanroom space for micro and nano-fabrication. The Nanoscribe Photonic Professional GT+, ZYGO nexview NX2 optical profilometer, KLA Tencor AlphaStep D600, CEE Apogee spin coater and ABMUSA Mask Aligner reside in this room. Benchtop space and a 4' x 6' floating optical table are available for clean assembly and optical…

Probe station with 150 mm platen, manual positioners and stereo microscope system

6" diameter, 6.5" pyrex chamber, suitable for etching organic films 10-100 nm, three RF power settings up to 45 W max, connected to high purity O2 cylinder. 

Digital 3D microscope with 4k imaging from 20x-2500x. Includes motorized and encoded XY stage with encoded Z height, 3D software for surface roughness , profiling and 3D image stitching. 

This rack contains a Keysight 4-port PNA Network Analyzer and Keysight Lightwave Component Analyzer testing photonic integrated circuits on the MapleLeaf Photonics and FormFactor Probe Stations as well as high speed electronics and microwave photonics up to 67 GHz.

This rack contains a Keysight Semiconductor Device Analyzer, a 65 GSa/sec Arbitrary Waveform Generator, and a 20 GHz Digital Signal Analyzer for testing photonic integrated circuits on the MapleLeaf Photonics and FormFactor Probe Stations. 

200 mm platen with motorized XY stage for 2D and 3D profiling for film heights from ~100 nanometers to 1200 micrometers. Includes step height standards for reference.

MapleLeaf Photonics probe station with single die mount stage, edge and grating coupling capabilties, including contact sensors, automated die eject, Long-travel piezo fiber positioner with motorized 6 DOF, top view and side view cameras, electrical probe positioners, manual fiber align stage.

Digital 3D printer with 227 x 327 mm substrate table, dual printheads, drop analysis camera, ink recirculation, UV curing bridge, substate heater, Gerber file rasterzation, supports FujiFilm Dimatix, Konica Minolta, OCE and Xaar printheads

2 photon polymerization 3D printer with ~200 nm lateral and vertical resolution, set up to support small feature (SF), medium feature (MF) and large feature (LF) through 63x, 25x, 20x, and 10x objective lenses for printing on ITO, soda lime and silicon substrates. Includes Nanoscribe resins IP-DIP, IP-L, IP-S, IP-Q, IP-Visio and IP-PDMS.

Manual stereo microscope with trinocular setup for magnification range from 10-70x, includes Nikon Elements-D software for image capture, measurement and annotations.

Portable fiber cleaving and fusion spicing for single mode, multimode and PM fibers

200 mm platen with motorized XY stage, AFM supports contact, non-contact and tapping modes as well as other advanced electrical, mechanical and thermal scanning modes. Includes SmartScan scanning and XEI software for image processing. 

This rack contains tunable fiber lasers (centered on 1310 nm, and 1550 nm), a polarization synthesizer, and optical wavelength and power meters for testing photonic integrated circuits on the MapleLeaf Photonics and FormFactor Probe Stations. 

Spin coater to accommodate substrates from mm to 200 mm or 7"x7" substrates USB and ethernet ports for uploading or downloading recipe parameters, max spin speed 12,000 rpm.

UV curing system with 385 nn LED array, can be used as course photolithography system with mask in direct contact.

visible and shortwave infrared (vSWIR) camera 640x512 resolution and 100 Hz frame rate with GigE interface. Includes 50 mm focal length C-mount lens and is also compatible with Navitar 12x telecentric zoom lens. Can be incorporated into the MapleLeaf Photonics Probe stations for fiber alignment and imaging.

Coherence Scanning Interferometer (CSI) microscope for non-contact 2D and 3D surface profiling, includes 2.75x, 10x, and 50x objective lenses. Motorized 200 mm x 200 mm stage with 100 mm of Z travel allows for automated measurements and image stitching. Uses MX v8 software.