KLA Stylus Profilometer

200 mm platen with motorized XY stage for 2D and 3D profiling for film heights from ~100 nanometers to 1200 micrometers. Includes step height standards for reference.

Model
Alpha Step D600
Internal Price
$15 / hr. Self Use
$65 / hr. Training
$65 / hr. Assisted Use
External Price
$65 / hr. Self Use
$165 / hr. Training
$165 / hr. Assisted Use
Facility
Manager
James Eakin, jeakin@wpi.edu

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