Dual camera semiautomated 6" mask aligner system with vacuum contact between mask and substrate, includes backside IR illumination, set up for i-line (365 nm), and also has deep UV bulb (200 nm)
Model
6" 500W DUAL CCD
Internal Price
$40 / hr. Self Use
$90 / hr. Training
$90 / hr. Assisted Use
External Price
$115 / hr. Self Use
$215 / hr. Training
$215 / hr. Assisted Use
Facility
Manager
James Eakin, jeakin@wpi.edu
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