Approximately 600 square feet of class 10,000 cleanroom space for micro and nano-fabrication. The Nanoscribe Photonic Professional GT+, ZYGO nexview NX2 optical profilometer, KLA Tencor AlphaStep D600, CEE Apogee spin coater and ABMUSA Mask Aligner reside in this room. Benchtop space and a 4' x 6' floating optical table are available for clean assembly and optical setups. In addition, there are two chemical hoods and flammables storage.
Model
Class 10,000
Internal Price
$12.50 / hr. Self Use
$65 / hr. Training
$65 / hr. Assisted Use
External Price
$40 / hr. Self Use
$140 / hr. Training
$140 / hr. Assisted Use
Facility
Manager
James Eakin, jeakin@wpi.edu
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