6" diameter, 6.5" pyrex chamber, suitable for etching organic films 10-100 nm, three RF power settings up to 45 W max, connected to high purity O2 cylinder.
Model
PDC-001 HP
Internal Price
$25 / hr. Self Use
$75 / hr. Training
$75 / hr. Assisted Use
External Price
$110 / hr. Self Use
$220 / hr. Training
$220 / hr. Assisted Use
Facility
Manager
James Eakin, jeakin@wpi.edu
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