Focused Ion Beam Scanning Electron Microscopy (FIB-SEM)

This Schottky emission gun SEM-Ga Focus-ion beam low-vacuum system is equipped with multiple detectors, including  ETD, in-lens trinity detection system, lvd, ICE detector, retractable DBS detector, retractable STEM detector, as well as Oxford Instruments Ultim Max 100 mm2 EDS and Symmetry 2 EBSD system.​